2022 Adsorption selectivity of TiCl4 precursor on Pt surfaces for atomic layer deposition by density functional theory
본문
- Author
- Jihye Baek†, Kyungju Nam†, Jung-yeon Park, JinHyeok Cha*
- Journal
- Applied Surface Science
- Vol./ Page
- 606, 154695
- Year
- 2022
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